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Enabling technologies for MEMS and nanodevices : advanced micro and nanosystems / edited by Henry Baltes [and five others].

Contributor(s): Material type: TextSeries: Advanced micro and nanosystems, 1Publication details: Weinheim : Wiley-VCH, c2013Edition: First editionDescription: xii, 427 pages : illustrations ; 26 cmISBN:
  • 9783527334988
Subject(s): LOC classification:
  • CIR TK 875 E53 2013
Contents:
Advanced Micro & Nanosystems Volume 1 Enabling Technology for MEMS and Nanodevices; Preface; Contents; List of Contributors; 1 M3: the Third Dimension of Silicon; 2 Trends in MEMS Commercialization; 3 Capacitive Interfaces for MEMS; 4 Packaging of Advanced Micro- and Nanosystems; 5 High-frequency Integrated Microelectromechanical Resonators and Filters; 6 MEMS in Mass Storage Systems; 7 Scanning Micro- and Nanoprobes for Electrochemical Imaging; 8 Nanofluidic Modeling and Simulation; 9 Nanofluidics Structures and Devices; 10 Carbon Nanotubes and Sensors: a Review
Summary: This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scann
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Cover image Item type Current library Home library Collection Shelving location Call number Materials specified Vol info URL Copy number Status Notes Date due Barcode Item holds Item hold queue priority Course reserves
Book Cavite State University - CCAT Campus Book GCS CIR TK 875 E53 2013 (Browse shelf(Opens below)) 1 Available R0011328

Includes bibliographical references and index.

Advanced Micro & Nanosystems Volume 1 Enabling Technology for MEMS and Nanodevices; Preface; Contents; List of Contributors; 1 M3: the Third Dimension of Silicon; 2 Trends in MEMS Commercialization; 3 Capacitive Interfaces for MEMS; 4 Packaging of Advanced Micro- and Nanosystems; 5 High-frequency Integrated Microelectromechanical Resonators and Filters; 6 MEMS in Mass Storage Systems; 7 Scanning Micro- and Nanoprobes for Electrochemical Imaging; 8 Nanofluidic Modeling and Simulation; 9 Nanofluidics
Structures and Devices; 10 Carbon Nanotubes and Sensors: a Review

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scann

In English text.

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