Enabling technologies for MEMS and nanodevices : (Record no. 892)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 02398nam a22003377a 4500 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | OSt |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20231013205908.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 210316b ||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9783527334988 |
| 040 ## - CATALOGING SOURCE | |
| Language of cataloging | English. |
| Transcribing agency | CvSU-CCAT Campus Library. |
| Description conventions | rda. |
| Original cataloging agency | CvSU-CCAT Campus Library. |
| 050 ## - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | CIR TK 875 |
| Item number | E53 2013 |
| 245 ## - TITLE STATEMENT | |
| Title | Enabling technologies for MEMS and nanodevices : |
| Remainder of title | advanced micro and nanosystems / |
| Statement of responsibility, etc. | edited by Henry Baltes [and five others]. |
| 250 ## - EDITION STATEMENT | |
| Edition statement | First edition. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Weinheim : |
| Name of publisher, distributor, etc. | Wiley-VCH, |
| Date of publication, distribution, etc. | c2013 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xii, 427 pages : |
| Other physical details | illustrations ; |
| Dimensions | 26 cm. |
| 490 ## - SERIES STATEMENT | |
| Series statement | Advanced micro and nanosystems, 1 |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographical references and index. |
| 505 ## - FORMATTED CONTENTS NOTE | |
| Formatted contents note | Advanced Micro & Nanosystems Volume 1 Enabling Technology for MEMS and Nanodevices; Preface; Contents; List of Contributors; 1 M3: the Third Dimension of Silicon; 2 Trends in MEMS Commercialization; 3 Capacitive Interfaces for MEMS; 4 Packaging of Advanced Micro- and Nanosystems; 5 High-frequency Integrated Microelectromechanical Resonators and Filters; 6 MEMS in Mass Storage Systems; 7 Scanning Micro- and Nanoprobes for Electrochemical Imaging; 8 Nanofluidic Modeling and Simulation; 9 Nanofluidics<br/>Structures and Devices; 10 Carbon Nanotubes and Sensors: a Review<br/> |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc. | This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scann<br/> |
| 546 ## - LANGUAGE NOTE | |
| Language note | In English text. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectromechanical systems. |
| 9 (RLIN) | 2594 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectronics. |
| 9 (RLIN) | 2595 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Nanotechnology. |
| 9 (RLIN) | 2596 |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Brand, Oliver, editor. |
| 9 (RLIN) | 2597 |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Fedder, Gary K., editor. |
| 9 (RLIN) | 2598 |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Hierold, Christofer, editor. |
| 9 (RLIN) | 2599 |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Korvink, Jan G., editor. |
| 9 (RLIN) | 2600 |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Tabata, Osamu, editor. |
| 9 (RLIN) | 2601 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Book |
| Classification part | TK 875 E53 2013 |
| Call number prefix | CIR |
| Source of classification or shelving scheme | Library of Congress Classification |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Collection code | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Coded location qualifier | Cost, normal purchase price | Full call number | Barcode | Date last seen | Copy number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Library of Congress Classification | Book | Cavite State University - CCAT Campus | Cavite State University - CCAT Campus | GCS | 12/23/2016 | Purchased | GCS | 6661.00 | CIR TK 875 E53 2013 | R0011328 | 10/15/2025 | 1 | 03/17/2021 | Book |