| 000 | 02398nam a22003377a 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20231013205908.0 | ||
| 008 | 210316b ||||| |||| 00| 0 eng d | ||
| 020 | _a9783527334988 | ||
| 040 |
_bEnglish. _cCvSU-CCAT Campus Library. _erda. _aCvSU-CCAT Campus Library. |
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| 050 |
_aCIR TK 875 _bE53 2013 |
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| 245 |
_aEnabling technologies for MEMS and nanodevices : _badvanced micro and nanosystems / _cedited by Henry Baltes [and five others]. |
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| 250 | _aFirst edition. | ||
| 260 |
_aWeinheim : _bWiley-VCH, _cc2013 |
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| 300 |
_axii, 427 pages : _billustrations ; _c26 cm. |
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| 490 | _aAdvanced micro and nanosystems, 1 | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 505 | _aAdvanced Micro & Nanosystems Volume 1 Enabling Technology for MEMS and Nanodevices; Preface; Contents; List of Contributors; 1 M3: the Third Dimension of Silicon; 2 Trends in MEMS Commercialization; 3 Capacitive Interfaces for MEMS; 4 Packaging of Advanced Micro- and Nanosystems; 5 High-frequency Integrated Microelectromechanical Resonators and Filters; 6 MEMS in Mass Storage Systems; 7 Scanning Micro- and Nanoprobes for Electrochemical Imaging; 8 Nanofluidic Modeling and Simulation; 9 Nanofluidics Structures and Devices; 10 Carbon Nanotubes and Sensors: a Review | ||
| 520 | _aThis edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scann | ||
| 546 | _aIn English text. | ||
| 650 |
_aMicroelectromechanical systems. _92594 |
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| 650 |
_aMicroelectronics. _92595 |
||
| 650 |
_aNanotechnology. _92596 |
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| 700 |
_aBrand, Oliver, editor. _92597 |
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| 700 |
_aFedder, Gary K., editor. _92598 |
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| 700 |
_aHierold, Christofer, editor. _92599 |
||
| 700 |
_aKorvink, Jan G., editor. _92600 |
||
| 700 |
_aTabata, Osamu, editor. _92601 |
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| 942 |
_cBK _hTK 875 E53 2013 _kCIR _2lcc |
||
| 999 |
_c892 _d892 |
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