Enabling technologies for MEMS and nanodevices :  advanced micro and nanosystems / 
edited by Henry Baltes [and five others]. 
 - First edition. 
 - Weinheim :  Wiley-VCH,  c2013 
 - xii, 427 pages :   illustrations ;  26 cm. 
 - Advanced micro and nanosystems, 1 .
<br/><br/>Includes bibliographical references and index. 
<br/><br/>Advanced Micro & Nanosystems Volume 1 Enabling Technology for MEMS and Nanodevices; Preface; Contents; List of Contributors; 1 M3: the Third Dimension of Silicon; 2 Trends in MEMS Commercialization; 3 Capacitive Interfaces for MEMS; 4 Packaging of Advanced Micro- and Nanosystems; 5 High-frequency Integrated Microelectromechanical Resonators and Filters; 6 MEMS in Mass Storage Systems; 7 Scanning Micro- and Nanoprobes for Electrochemical Imaging; 8 Nanofluidic Modeling and Simulation; 9 Nanofluidics<br/>Structures and Devices; 10 Carbon Nanotubes and Sensors: a Review<br/> 
<br/><br/> This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scann<br/> 
<br/><br/><br/>In English text. 
<br/><br/><label>ISBN: </label>9783527334988 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems. <br/>Microelectronics. <br/>Nanotechnology. 
<br/><br/><label>LC Class. No.: </label>CIR TK 875  / E53 2013